EXQU® Perfluoroelastomer

EXQUⓇ FFKM Perfluoroelastomer  O-RING

EXQUⓇ Bonded Slit Valve Plate

[O-RING]EXQUⓇ FFKM Perfluoroelastomer

[O-RING]EXQUⓇ NF Series Data Sheets [O-RING]EXQUⓇ NF Series Data Sheets.PDF

[O-RING]EXQUⓇ P300W FFKM Perfluoroelastomer Data Sheets [O-RING]EXQUⓇ P300W FFKM Perfluoroelastomer Data Sheets.PDF

[O-RING]EXQUⓇ P300B FFKM Perfluoroelastomer Data Sheets [O-RING]EXQUⓇ P300B FFKM Perfluoroelastomer Data Sheets.PDF

[O-RING]EXQUⓇ P260C FFKM Perfluoroelastomer Data Sheets [O-RING]EXQUⓇ P260C FFKM Perfluoroelastomer Data Sheets . PDF

[O-RING]EXQUⓇ P250B FFKM Perfluoroelastomer Data Sheets [O-RING]EXQUⓇ P250B FFKM Perfluoroelastomer Data Sheets.PDF

[O-RING]EXQUⓇ FN77 Data Sheets.PDF [O-RING]EXQUⓇ FN77 Data Sheets.PDF

[O-RING]EXQUⓇ P70B FFKM Perfluoroelastomer Data Sheets.PDF

EXQU S280H Ultra-High Temperature Fluoro Rubber Series EXQU S280H .PDF

[EN]EXQUⓇ P300H FFKM Perfluoroelastomer Data Sheets [EN]EXQUⓇ P300H FFKM Perfluoroelastomer Data Sheets.PDF [EN]EXQUⓇ P300H FFKM Perfluoroelastomer Data Sheets.PDF

[O-RING]EXQUⓇ P70R FFKM Perfluoroelastomer Data Sheets.PDF [O-RING]EXQUⓇ P70R FFKM Perfluoroelastomer Data Sheets.PDF

[PACKING] EXQUⓇ FFKM Perfluoroelastomer

EXQUⓇ FFKM Perfluoroelastomer [Bonded Slit Valve Plate] EXQUⓇ FFKM Perfluoroelastomer [Bonded Slit Valve Plate] EXQUⓇ FFKM Perfluoroelastomer [Bonded Slit Valve Plate] EXQUⓇ FFKM Perfluoroelastomer [Bonded Slit Valve Plate] EXQUⓇ FFKM Perfluoroelastomer [Bonded Slit Valve Plate] EXQUⓇ FFKM Perfluoroelastomer [Bonded Slit Valve Plate] EXQUⓇ FFKM Perfluoroelastomer [Bonded Slit Valve Plate] EXQUⓇ FFKM Perfluoroelastomer [Bonded Slit Valve Plate] EXQUⓇ FFKM Perfluoroelastomer [Bonded Slit Valve Plate] O-RING

EXQUⓇ  P70B20 FFKM Perfluoroelastomer [Blue Color] - O-RING EXQUⓇ  P70B20 FFKM Perfluoroelastomer [Blue Color] - O-RING

EXQUⓇ  P70B10 FFKM Perfluoroelastomer [Blue Color] - O-RING EXQUⓇ  P70B10 FFKM Perfluoroelastomer [Blue Color] - O-RING

EXQU® FN77 Crystal Series EXQU® FN77 Crystal Series EXQU ® FN77 EXQU® FN77 product is designed for semiconductor or FPD industries requiring high purity by applying special techniques to polymerize NANO PTFE particles to fluoro elastomers to minimize contamination. This product minimizes the extraction of metal and organic materials in wet process by the application of NANO PTFE filler, greatly suppresses particle generation in dry process, exhibits excellent chemical resistance and strong mechanical properties, and is suitable for both dynamic and static seal applications. Stable operating temperature due to heat resistance is recommended up to 200 ℃ .

EXQU® NF Series  [O-RING] EXQU® NF Series  [O-RING] Main characteristics The EXQU® NF Series is excellent in plasma resistance properties, can be used for exhaust gas sections and has better characteristics than perfluoroelastomer for O 2 plasma. As a non-carbon product, it has few particles, and harmful metal ions have the characteristics equivalent to a white-based perfluoroelastomer. EXQU®NF Series is superior to FKM in strength and heat resistance. Typical Physical properties   EXQU ® NF-2 EXQU ® N70DB Color BEIGE / Brown Dark brown 100% Modulus a , Mpa 13 13.32 Elongation at break a , % 240 281 Hardness Shore A b 70 70 Compres s ion S e t c , % (70   hr at     200 ˚ C) 17 15 M a x. Con t in u

[O-RING] EXQU® S280H Ultra-High Temperature Fluoro Rubber Series EXQU® S280H   -  Ultra-High Temperature Fluoro Rubber Series Main characteristics EXQU® S280H greatly improves the heat resistance of fluoro  rubber. In addition, EXQU® S280H is a special fluoro  rubber which improves drastically the abrasion resistance and non-stickiness in addition to heat resistance. Unlike film coating, it is processed by surface modification method, so its characteristics are maintained for a long time. It is mainly used to replace the expensive high-temperature O-ring of FFKM (Perfluoroelastomer) material and is favorable for cost reduction. Features and advantages Excellent high temperature resistance / Excellent mechanical strength / Low compression set   Application fields Sealing of continuous sliding sections or repeated opening and closing sections (sealing of various control valves), The location s where sticking with metal is severe and repair is

EXQUⓇ  P300B FFKM Perfluoroelastomer EXQU® P300B Main characteristics EXQU®P300B is designed for dry etching, ashing, PVD and CVD (Chemical Vapor Deposition) processes in semiconductors with extreme plasma, high energy and high temperature. It exhibits the properties of reduced contamination, minimized weight loss and minimized degassing in oxygen and fluoro plasma environments. It has superb physical characteristics and mechanical properties such as excellent resistance to various chemicals and low compression set, maintains seal reliability in a vacuum condition for a long time, and is applied suitably to both static and dynamic applications. Features and advantages Superior plasma resistance / Low outgas / Low compression set / Excellent chemical resistance / Stable heat resistance Application fields Chamber lip seals / Bonded slit valve door seals / Bonded Gate valve door seals / Gas inlet seals EXQUⓇ  P300B FFKM Perfluoroelastomer

[O-RING]EXQUⓇ  P260C FFKM Perfluoroelastomer EXQU® P260C Main characteristics The EXQU® P260C product is excellent in the wide range of chemical resistance and especially designed for extreme plasma process of semiconductors. This product is suitable for the static and dynamic dry processes such as HDPCVD, PECVD, etc. with the low outgassing characteristics by applying a special technique to polymerize PTFE nanoparticles into the perfluoroelastomer to improve superior plasma resistance in the oxygen and fluorine plasma process and minimize the dust. Stable operating temperature is recommended up to 260˚C. Features and advantages Ultra-high purity and low metal ion content / Minimizing contamination with low surface corrosion / Excellent mechanical properties / Low outgassing Application fields Bonded Slit valve seals / Bonded Gate valve seals / Chamber lip seals / Gas inlet seals / Isolation valve seal [O-RING]EXQUⓇ  P260C FFKM Perfluoroelastomer

[O-RING]EXQUⓇ  P70R  FFKM Perfluoroelastomer EXQU ® P70R   Main characteristics EXQU®P70R is a perfluoroelastomer that is applied to various chemical processing fields with excellent chemical resistance and has enhanced mechanical properties to improve seal retention with a low compression set. This product is suitable for wet etching, stripping cleaning process and low density plasma at relatively not high temperature requiring chemical resistance. This product has excellent mechanical properties and is well suited for both static and dynamic applications. The maximum application temperature is around 230˚C due to heat resistance, however, the temperature of the selected fluid shall be considered separately. Features and advantages Low contamination / Excellent plasma resistance / Chemical resistance / Excellent mechanical strength / Low compression set Application fields Chamber lip seals / Bonded slit valve door seals / Bonded Gate v

[O-RING]EXQUⓇ  P250B  FFKM Perfluoroelastomer EXQU ® P250B Main characteristics EXQU®P250B is a perfluoroelastomer that is applied to various chemical processing fields with excellent chemical resistance and has enhanced mechanical properties to improve seal retention with a low compression set. This product shows excellent resistance to various chemicals such as acids, alkalis, ketones and esters, alcohols and hot waters, but limits its use to hot amines. The maximum operating temperature of this product is around 260˚C, however, the temperature of the selected fluid shall be considered separately. Features and advantages High temperature stability / Wide range of chemical compatibility / Low compression set / Excellent mechanical properties   Application fields Petrochemical industry / Energy industry / Aerospace industry / Nuclear industry / LCD, semiconductor industry