[O-RING]EXQUⓇ P70R FFKM Perfluoroelastomer
[O-RING]EXQUⓇ P70R FFKM Perfluoroelastomer
EXQU® P70R
Features and advantages
Low contamination / Excellent plasma resistance / Chemical resistance / Excellent mechanical strength / Low compression set
Application fields
Chamber lip seals / Bonded slit valve door seals / Bonded Gate valve door seals / Gas inlet seals
/ Slit Valve seals / Chemical Pump seals
EXQU® P70R
EXQU®P70R
is a perfluoroelastomer that is applied to various chemical processing fields
with excellent
chemical resistance and has enhanced mechanical properties to
improve seal retention with a low
compression set.
This product is suitable for wet etching, stripping cleaning process and low
density plasma at relatively not high
temperature requiring chemical
resistance. This product has excellent mechanical properties and is well suited
for both static and dynamic applications. The maximum application temperature
is around 230˚C due to heat
resistance, however, the
temperature of the selected fluid shall be considered separately.
Features and advantages
Low contamination / Excellent plasma resistance / Chemical resistance / Excellent mechanical strength / Low compression set
Application fields
Chamber lip seals / Bonded slit valve door seals / Bonded Gate valve door seals / Gas inlet seals
/ Slit Valve seals / Chemical Pump seals
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